텅스텐의 화학증착시 압력증가가 증착에 미치는 영향 ..

Title
텅스텐의 화학증착시 압력증가가 증착에 미치는 영향 ..
Authors
금동화윤호철이정중
Issue Date
1992-01
Publisher
대한금속학회지
Citation
v. 30, no. 8, 955-962
URI
http://pubs.kist.re.kr/handle/201004/11037
Appears in Collections:
KIST Publication > Article
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