DSpace at KIST: CF₄ synthesis by fluorination of CF₂Cl₂ and CCl₄

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DC Field	Value	Language
dc.contributor.author	Lee Youn-Woo	-
dc.contributor.author	이경환	-
dc.contributor.author	Lim Jong Sung	-
dc.contributor.author	Kim Jae Duck	-
dc.contributor.author	LEE YOUN YONG	-
dc.date.accessioned	2024-01-13T19:31:53Z	-
dc.date.available	2024-01-13T19:31:53Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/110545	-
dc.language	English	-
dc.subject	반도체용가스	-
dc.subject	사불화메탄	-
dc.title	CF₄ synthesis by fluorination of CF₂Cl₂ and CCl₄	-
dc.title.alternative	CF₂ Cl₂와 CCl₄의 불화에 의한 CF₄의 합성	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	Theories and Applications of Chem. Eng., v.4, no.1, pp.317 - 320	-
dc.citation.title	Theories and Applications of Chem. Eng.	-
dc.citation.volume	4	-
dc.citation.number	1	-
dc.citation.startPage	317	-
dc.citation.endPage	320	-
dc.citation.conferencePlace	KO	-

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