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One-step selective growth of GaAs on V-groove patterned GaAs substrate using CBr4 and CCl4

Authors

KIM EUN KYU; Kim Seong Il; KIM YOUN; PARK YOUNG KYUN; SON CHANG-SIK; 한철구; 황성민; Min Suk-Ki; 최인훈

Citation

24th international symposium on compound semiconductors, pp.193

Keywords

selective growth

URI

https://pubs.kist.re.kr/handle/201004/110634

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KIST Conference Paper > Others

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