DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.authorMoon Sung Wook-
dc.contributor.authorKANG HO KWAN-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorJung Jae Hoon-
dc.contributor.author이상조-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.authorICE Turcu-
dc.contributor.authorCM Mann-
dc.date.accessioned2024-01-13T20:03:15Z-
dc.date.available2024-01-13T20:03:15Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/110887-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectLIGA-
dc.subjectx-ray lithography-
dc.titleA laser plasma x-ray lithography for 2.5 THz waveguide cavity-
dc.title.alternative2.5THz waveguide cavity를 위한 laser plasma x-ray lithography-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한전기학회 MEMS 연구회 학술발표회 논문집 , 고려대, pp.11 - 16-
dc.citation.title대한전기학회 MEMS 연구회 학술발표회 논문집 , 고려대-
dc.citation.startPage11-
dc.citation.endPage16-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE