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Fabrication and field emission study of 2-inch DLC coated Si FEAs panel

Other Titles

다이아몬드상 카본이 코팅된 2- 인치 실리콘 전계 방출 소자 제작 및 특성 연구

Authors

이상조; KANG HO KWAN; Ju Byeong Kwon; Moon Sung Wook; LEE YUN HI; 전동렬; OH MYUNG HWAN

Citation

대한전기학회 MEMS 연구회 학술발표회 논문집 , 고려대, pp.249 - 253

Keywords

FED; FEA; DLC coating

URI

https://pubs.kist.re.kr/handle/201004/110904

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KIST Conference Paper > Others

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