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Reduced Al-Ga interdiffusion in GaAs/AlGaAs multiple quantum well structure by introducing Si-rich SiN capping layer for dielectric cap quantum well disordering

Other Titles

Si-rich SiN를 이용한 GaAs/AlGaAs 다층 양자 우물에서 Al-Ga 상호 확산의 감소

Authors

Choi Won Jun; KIM HWE JONG; 한상민; Syed ljaz Shah; CHOI SUKGEUN; Lee Seok; Woo Deok Ha; Han Il Ki; Kim Sun Ho; Lee Jung Il; KANG KWANG NHAM

Citation

MRS (Material Research Society) 97 Fall meeting, pp.1 - ?

Keywords

quantum well; disordering; SiN; interdiffusion

URI

https://pubs.kist.re.kr/handle/201004/110948

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KIST Conference Paper > Others

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