Si-rich SiN를 이용한 GaAs/AlGaAs 다층 양자 우물에서 Al-Ga 상호 확산의 감소

Other Titles
Reduced Al-Ga interdiffusion in GaAs/AlGaAs multiple quantum well structure by introducing Si-rich SiN capping layer for dielectric cap quantum well disordering
Authors
Choi Won Jun한상민Syed ljaz ShahCHOI SUKGEUNWoo Deok HaHan Il KiKIM HWE JONGKim Sun HoLee Jung IlKANG KWANG NHAM
Citation
MRS (Materials Research Society) 97 Fall meeting, pp.?
Keywords
quantum well
URI
https://pubs.kist.re.kr/handle/201004/110949
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KIST Conference Paper > Others
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