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Thermal stability of Cu films on TiN/Ti/Si(100) by partially ionized beam deposition

Authors

Hong Kyu Jang; CHOI WON-KOOK; KOH SEOK KEUN; K. H. Kim; D. J. Choi; S. Han; S. C. Choi; 정형진

Citation

Mat. res. soc. symp. proc., v.438, pp.387 - ?

Keywords

thermal stability

URI

https://pubs.kist.re.kr/handle/201004/111163

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KIST Conference Paper > Others

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