The investigations of dielectric and structural properties of polycrystalline BaTiO//3 thin films on Pt substrates by rf magnetron sputtering

Title
The investigations of dielectric and structural properties of polycrystalline BaTiO//3 thin films on Pt substrates by rf magnetron sputtering
Authors
장진욱조운조한택상최상삼정수진
Keywords
BaTiO//3 thin film; rf magnetron sputtering; Pt substrate; polycrystalline thin film
Issue Date
1998-01
Publisher
Ferroelectrics
Citation
VOL 205, NO 1, 37-48
URI
http://pubs.kist.re.kr/handle/201004/11119
ISSN
0015-0193
Appears in Collections:
KIST Publication > Article
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