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Gate passivation technique for modulation-doped-effect-transistors using electron beam lithography

Authors

B.H. Choi; KIM HWE JONG; S.K. Jung; E.K. Kim; S.K. Min; S.W. Hwang; J.H. Park

Citation

춘계 물리학회지, v.15, no.1, pp.192 - ?

Keywords

passivation

URI

https://pubs.kist.re.kr/handle/201004/111238

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KIST Conference Paper > Others

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