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Adhesion improvement between Au films and Si substrate by ion beam irradation

Authors

KOH SEOK KEUN; Hong Kyu Jang; K. H. Kim; S. Han; CHOI WON-KOOK; 정형진

Citation

Journal of vacuum science and technology A., v.15, no.4, pp.1 - ?

URI

https://pubs.kist.re.kr/handle/201004/111278

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KIST Conference Paper > Others

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