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Fabrication and field emission study of gated diamondlike-carbon-coated silicon tips.

Authors

이상조; Ju Byeong Kwon; LEE YUN HI; OH MYUNG HWAN; 전동렬; C. G. Ko

Citation

Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia., pp.193 - 196

Keywords

field emitter; carbon; electron field emission; oxidation; plasma CVD coatings; semiconductor technology; silicon; sputter etching; vacuum microelectronics

URI

https://pubs.kist.re.kr/handle/201004/111378

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KIST Conference Paper > Others

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