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전자선 증착된 실리콘 산화막 층을 이용한 직접 접합에 관한 연구 .

Authors

Ju Byeong Kwon; 박흥우; LEE YUN HI; 정성재; LEE NAM YANG; 고근하; M.R. Haskard; PARK JEONG HO; OH MYUNG HWAN

Citation

대한전기학회 하계학술대회 논문집, pp.1988

Keywords

MEMS

URI

https://pubs.kist.re.kr/handle/201004/111386

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KIST Conference Paper > Others

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