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Structure and mechanical properties of Si incorporated diamond-like carbon films prepared by PACVD.

Authors

Lee Kwang Ryeol; EUN KWANG YONG; 김명근; 최준엽

Citation

Proceedings of the 1st international diamond symposium, 5-7 November 1996, Seoul, Korea, pp.164 - 169

Keywords

diamond-like carbon

URI

https://pubs.kist.re.kr/handle/201004/111463

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KIST Conference Paper > Others

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