Consideration on the various phenomena appeared at bonding interface in fusion-bonded silicon wafer pairs

Title
Consideration on the various phenomena appeared at bonding interface in fusion-bonded silicon wafer pairs
Authors
방준호주병권오명환박종완
Issue Date
1993-01
Publisher
전기학회 하계학술대회, 설악레저텔
Citation
, 1057-1059
URI
http://pubs.kist.re.kr/handle/201004/11153
Appears in Collections:
KIST Publication > Conference Paper
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