Deposition temperature dependence of electrical instability in InP MIS provided by PECVD silicon nitride.

Title
Deposition temperature dependence of electrical instability in InP MIS provided by PECVD silicon nitride.
Authors
강광남이정일한일기M. B. LeeY. J. LeeH. Lim
Keywords
InP MIS
Issue Date
1993-01
Publisher
Journal of materials science letters
Citation
v. 12, 90-91
URI
http://pubs.kist.re.kr/handle/201004/11157
Appears in Collections:
KIST Publication > Article
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