DSpace at KIST: Preparation of boron nitride thin films by MOCVD

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DC Field	Value	Language
dc.contributor.author	이상열	-
dc.contributor.author	남영우	-
dc.contributor.author	Lee Joong Kee	-
dc.contributor.author	Park Dal keun	-
dc.date.accessioned	2024-01-13T21:31:51Z	-
dc.date.available	2024-01-13T21:31:51Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/111615	-
dc.language	English	-
dc.subject	MOCVD	-
dc.title	Preparation of boron nitride thin films by MOCVD	-
dc.title.alternative	MOCVD에 의한 BN 제조	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	화학공학의 이론과 응용 = Theories and applications of chem. eng., v.2, no.1, pp.1009 - 1012	-
dc.citation.title	화학공학의 이론과 응용 = Theories and applications of chem. eng.	-
dc.citation.volume	2	-
dc.citation.number	1	-
dc.citation.startPage	1009	-
dc.citation.endPage	1012	-
dc.citation.conferencePlace	KO	-

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