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Lateral growth rate control of GaAs on patterned substrates by CCl//4 and CBr//4 during MOCVD.

Authors

KIM YOUN; KIM MOO SUNG; Kim Seong Il; 황성민; MIN BYUNG DON; Min Suk-Ki

Citation

8th int. conf. on MOVPE, pp.?

Keywords

MOCVD

URI

https://pubs.kist.re.kr/handle/201004/111630

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KIST Conference Paper > Others

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