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Diamond deposition by multi-cathode DC PACVD

Authors

LEE JAE KAP; Lee Wook Seong; Baik Young Joon; EUN KWANG YONG

Citation

Proceedings of the 1st International diamond symposium, 5-7 November 1996, Seoul, Korea, pp.121 - 126

Keywords

diamond deposition; DC PACVD; multi-cathode; OES; Raman

URI

https://pubs.kist.re.kr/handle/201004/111681

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KIST Conference Paper > Others

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