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Characterization of solid surfaces using time-of-flight secondary ion mass spectrometry.

Authors

LEE YEON HEE; HAN SEUNG HEE; Lee junghye; 윤정현

Citation

Fifth Eurasia Conference on Chemical Sciences, pp.31

Keywords

TOF-SIMS; Plasma ion implantation; Multilayer

URI

https://pubs.kist.re.kr/handle/201004/111698

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KIST Conference Paper > Others

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