Characteristics of laser dry etching for AlGaAs/GaAs multilayer.

Authors
Kim Seong IlMin Suk-Ki박세기MIN BYUNG DONKIM MOO SUNG이천
Citation
Proc. 3rd semicon. conf. Korea, pp.17 - 18
Keywords
MOCVD
URI
https://pubs.kist.re.kr/handle/201004/111699
Appears in Collections:
KIST Conference Paper > Others
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