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dc.contributor.authorJung Jae Hoon-
dc.contributor.authorJu Byeong Kwon-
dc.contributor.authorLEE YUN HI-
dc.contributor.authorOH MYUNG HWAN-
dc.contributor.author장진-
dc.date.accessioned2024-01-13T22:00:43Z-
dc.date.available2024-01-13T22:00:43Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111803-
dc.languageEnglish-
dc.subjectfield emission display-
dc.subjectinsulating film-
dc.subjectelectrical characteristics-
dc.titleCharacteristics of SiNx films on wet-etched Si for field emission device-
dc.title.alternative전계 방출 소자용으로 제조한 단결정 실리콘 기판에 증착된 실리콘 질화막에 대한 특성 연구-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation'95 대한전기학회 하계학술대회 논문집, pp.1137 - 1139-
dc.citation.title'95 대한전기학회 하계학술대회 논문집-
dc.citation.startPage1137-
dc.citation.endPage1139-
dc.citation.conferencePlaceKO-
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