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Effects of sputtering condition on the internal stress of permalloy thin films.

Authors

Kim Hi Jung; KIM HYON TAE; Han Suk Hee; 강일구; 김상주

Citation

Proceedings of the 2nd Pacific RIM international conference on advanced materials and processing., pp.1369 - 1374

Keywords

internal stress

URI

https://pubs.kist.re.kr/handle/201004/111815

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KIST Conference Paper > Others

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