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dc.contributor.authorKPARK KYUNG HYUN-
dc.contributor.authorByun Young Tae-
dc.contributor.authorKim Young Hwan-
dc.contributor.authorKim Sun Ho-
dc.contributor.authorCHOI SANG SAM-
dc.contributor.author조욱래-
dc.contributor.author박승한-
dc.contributor.author김웅-
dc.date.accessioned2024-01-13T22:01:51Z-
dc.date.available2024-01-13T22:01:51Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/111871-
dc.languageKorean-
dc.subject이온 빔 보조 식각 방법(IBAE)-
dc.subjectECR 이온 식각법-
dc.subjectMBE 성장 기법-
dc.subject저손실 광도파로-
dc.title이온 빔 보조 식각 방법을 이용한 GaAs/AlGaAs 저손실 광도파로의 제작 .-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationPhotonics Coference '95, pp.253 - 254-
dc.citation.titlePhotonics Coference '95-
dc.citation.startPage253-
dc.citation.endPage254-
dc.citation.conferencePlaceKO-
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