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Airflow velocity effect on particle deposition toward a horizontal wafer surface.

Other Titles

기류속도가 수평 웨이퍼상의 입자침착에 미치는 영향 =

Authors

Bae Gwi-Nam; Chun-Sik Lee; NO HEE CHEON

Citation

대한기계학회 '94 년도 추계학술대회논문집 (II)., pp.252 - 257

Keywords

particle deposition velocity; 입자침착속도; airflow velocity; 기류속도; thermophoresis; 열영동; horizontal wafer; 수평웨이퍼

URI

https://pubs.kist.re.kr/handle/201004/112237

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KIST Conference Paper > Others

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