Dependence of carbon incorporation on crystallographic orientation of GaAs and AlGaAs grown by metalorganic chemical vapor deposition using CBr4

Title
Dependence of carbon incorporation on crystallographic orientation of GaAs and AlGaAs grown by metalorganic chemical vapor deposition using CBr4
Authors
손창식김성일김용박영균김은규민석기최인훈
Keywords
GaAs; carbon doping; carbon tetrabromide; metalorganic chemical vapor deposition
Issue Date
1997-08
Publisher
Journal of applied physics.
Citation
VOL 82, NO 3, 1205-1207
URI
http://pubs.kist.re.kr/handle/201004/11227
Appears in Collections:
KIST Publication > Article
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