Performance of plasma deposited tungsten nitride diffusion barrier for Al and Au metallizations.

Title
Performance of plasma deposited tungsten nitride diffusion barrier for Al and Au metallizations.
Authors
김용태이창우민석기
Issue Date
1993-08
Publisher
6th int'l conf. on microprocess, Hiroshima
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/11241
Appears in Collections:
KIST Publication > Conference Paper
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