The effects of post annealing on the electrical characteristics of thin PECVD oxide.

Authors
PARK YOUNG JOON노태문백종태남기수
Citation
Proc. 2nd int'l. conf. elec. mats., pp.539 - ?
URI
https://pubs.kist.re.kr/handle/201004/112613
Appears in Collections:
KIST Conference Paper > Others
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