Relationship between the shape of KOH-etched bonding interface and the interfacial oxide condition in silicon direct bonding

Title
Relationship between the shape of KOH-etched bonding interface and the interfacial oxide condition in silicon direct bonding
Authors
주병권차균현오명환
Issue Date
1994-01
Publisher
전자공학회 하계종합학술대회, 전북대
Citation
, 445-448
URI
http://pubs.kist.re.kr/handle/201004/11276
Appears in Collections:
KIST Publication > Conference Paper
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