Nitrogen implanted tungsten thin films for Cu diffusion barrier.

Title
Nitrogen implanted tungsten thin films for Cu diffusion barrier.
Authors
김용태D. J. KimC. S. KwonI. H. Choi민석기
Issue Date
1994-01
Publisher
한국물리학회 제 69 회 학술논문 발표회
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/11311
Appears in Collections:
KIST Publication > ETC
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