Novel facet evolution of carbon-doped AlGaAs/GaAs multilayers on nonplanar substrate using CCl//4 grown by metalorganic chemical vapor deposition (MOCVD).

Title
Novel facet evolution of carbon-doped AlGaAs/GaAs multilayers on nonplanar substrate using CCl//4 grown by metalorganic chemical vapor deposition (MOCVD).
Authors
김성일민석기김용김무성박양근안준오
Keywords
MOCVD; GaAs; AlGaAs
Issue Date
1994-01
Publisher
Bull. Korean phys. soc.
Citation
v. 12, no. 2, ?-?
URI
http://pubs.kist.re.kr/handle/201004/11312
Appears in Collections:
KIST Publication > Article
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