Direct bonding between spacer and field emitter array using an electron-beam evaporated interlayer

Title
Direct bonding between spacer and field emitter array using an electron-beam evaporated interlayer
Authors
박흥우주병권이윤희강인병N. SamaanM. R. Haskard박정호오명환
Keywords
MEMS; FED; wafer bonding
Issue Date
1997-03
Publisher
SPIE proceedings
Citation
VOL 3046, 328-335
URI
http://pubs.kist.re.kr/handle/201004/11322
Appears in Collections:
KIST Publication > Conference Paper
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