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dc.contributor.author이재갑-
dc.contributor.author이욱성-
dc.contributor.author백영준-
dc.contributor.author은광용-
dc.date.accessioned2015-12-02T04:58:18Z-
dc.date.available2015-12-02T04:58:18Z-
dc.date.issued199401-
dc.identifier.citation, 69-72-
dc.identifier.other4007-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/11347-
dc.publisherAdvances in new diamond science and technology-
dc.subjectdiamond deposition-
dc.subjectDC PACVD-
dc.subjectthick film-
dc.subjectCVD diamond-
dc.subjectmethane concentration-
dc.subjectmorphology-
dc.subjectFWHM-
dc.titleSynthesis of diamond thick films by DC PACVD-
dc.typeConference Paper-
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KIST Publication > Conference Paper
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