Optical and electrical properties of titanium dioxide films with a high magnitude dielectric constant grown on p-Si by metalorganic chemical vapor deposition at low temperature

Title
Optical and electrical properties of titanium dioxide films with a high magnitude dielectric constant grown on p-Si by metalorganic chemical vapor deposition at low temperature
Authors
T. W. KimM. JungH. J. KimT. H. Park윤영수W. N. Kang염상섭H. K. Na
Keywords
thin films
Issue Date
1994-03
Publisher
Applied physics letters
Citation
VOL 64, NO 11, 1407-1409
URI
http://pubs.kist.re.kr/handle/201004/11376
ISSN
00036951
Appears in Collections:
KIST Publication > Article
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