Measurement of particle deposition velocity toward a vertical wafer surface.

Title
Measurement of particle deposition velocity toward a vertical wafer surface.
Authors
배귀남이춘식박승오안강호
Keywords
particle deposition velocity; 입자침착속도; 수직웨이퍼; 대류확산
Issue Date
1995-01
Publisher
공기조화·냉동공학 논문집 .
Citation
v. 7, no. 3, 521-527
URI
http://pubs.kist.re.kr/handle/201004/11424
Appears in Collections:
KIST Publication > Article
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