A study on the particle deposition toward a rotating wafer surface.

Title
A study on the particle deposition toward a rotating wafer surface.
Authors
배귀남안강호
Keywords
particle deposition; 입자침착; 회전웨이퍼; 입자침착속도; 회전속도
Issue Date
1995-01
Publisher
대한기계학회 1995 년도 추계학술대회논문집 (II).
Citation
, 350-354
URI
http://pubs.kist.re.kr/handle/201004/11449
Appears in Collections:
KIST Publication > Conference Paper
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