Growth of cubic SiC films using 1,3-disilabutane.

Title
Growth of cubic SiC films using 1,3-disilabutane.
Authors
정일남연승호J. H. BooK.-S. YuY. Kim
Keywords
cubic SiC films
Issue Date
1995-01
Publisher
Chem. mater.
Citation
v. 7, 694-698
URI
http://pubs.kist.re.kr/handle/201004/11463
Appears in Collections:
KIST Publication > Article
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