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High-speed epitaxial lift-off for III-V-on-insulator transistors on Si substrates

Authors

Kim, SangHyeon; Geum, Dae-Myeong; Kim, Seong Kwang; Kim, Hyung-Jun; Song, Jin Dong; Choi, Won Jun

Issue Date

2017-01-05

Publisher

IEEE

Citation

IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

URI

https://pubs.kist.re.kr/handle/201004/114659

Appears in Collections:

KIST Conference Paper > 2017

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