Dramatically enhanced ambient effects in a multi-layer MoS2 transistor with channel thickness near maximum depletion width

Authors
Park, Chang SeonLee, ChangwooJung, Won JunPark, MinLee, Dong SuLee, Hong SeokJeon, Dae-Young
Issue Date
2022-08
Publisher
Elsevier BV
Citation
Microelectronic Engineering, v.264
Abstract
It is known that semiconducting two-dimensional transition metal dichalcogenides such as MoS2 and WSe2, widely attracted as advanced field-effect transistors (FETs) due to good surface roughness in nano-scale and outstanding gate control with the desired bandgap, are significantly affected by oxygen and water molecules in air. Here, the channel thickness-dependent ambient effects on operation of multi-layer MoS2 FETs are investi-gated for the first time. In particular, a multi-layer MoS2 FET with channel thickness similar to the maximum depletion width (D-max) exhibited dramatic changes in the on-current to off-current (I-on/I-off) ratio under ambient conditions. The results were verified using numerical simulations. Our work is important in terms of the development and optimization of highly sensitive chemical or gas sensors, and it furthers our understanding of how multi-layer MoS2 FETs operate.
Keywords
NANOWIRE TRANSISTORS; Semiconducting two-dimensional transition-metal dichalcogenides; MoS2 FETs; Ambient effect; Channel thickness-dependence; I-on/I-off ratio; Maximum depletion width(D-max); Numerical simulation
ISSN
0167-9317
URI
https://pubs.kist.re.kr/handle/201004/114781
DOI
10.1016/j.mee.2022.111868
Appears in Collections:
KIST Article > 2022
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