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Preparation of piezoelectric ZnO thin films by RF magnetron sputtering method and their surface analysis

Title: Preparation of piezoelectric ZnO thin films by RF magnetron sputtering method and their surface analysis

Authors: 임상우; 설용건; 최지원; 이전국; 정형진

Issue Date: 1995-01

Publisher: 화학공학; Journal of the Korean Institute of Chemical Engineers

Citation: VOL 33, NO 2, 235-242

URI: http://pubs.kist.re.kr/handle/201004/11482

ISSN: 0304-128X

Appears in Collections:: KIST Publication > Article

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