Preparation of piezoelectric ZnO thin films by RF magnetron sputtering method and their surface analysis

Title
Preparation of piezoelectric ZnO thin films by RF magnetron sputtering method and their surface analysis
Authors
임상우설용건최지원이전국정형진
Issue Date
1995-01
Publisher
화학공학; Journal of the Korean Institute of Chemical Engineers
Citation
VOL 33, NO 2, 235-242
URI
http://pubs.kist.re.kr/handle/201004/11482
ISSN
0304-128X
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE