Measurements and control of particle deposition velocity on a norizontal wafer with thermophoretic effect.

Title
Measurements and control of particle deposition velocity on a norizontal wafer with thermophoretic effect.
Authors
배귀남이춘식박승오
Keywords
particle deposition velocity
Issue Date
1995-01
Publisher
Aerosol science and technology
Citation
v. 23, no. 3, 321-330
URI
http://pubs.kist.re.kr/handle/201004/11487
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE