New resists based on N-protected polymaleimides having hydroxystyrene units.

Title
New resists based on N-protected polymaleimides having hydroxystyrene units.
Authors
안광덕김상태정찬문
Keywords
N-protected polymaleimides
Issue Date
1995-01
Publisher
Journal of photopolymer science and technology
Citation
v. 8, no. 1, 179-186
URI
http://pubs.kist.re.kr/handle/201004/11493
Appears in Collections:
KIST Publication > Article
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