이온 클러스터빔 증착법을 이용하여 증착된 구리박막의 특성 .

Title
이온 클러스터빔 증착법을 이용하여 증착된 구리박막의 특성 .
Authors
정형진고석근윤영수김기환김규철박태영이규왕박석진
Issue Date
1995-11
Publisher
응용물리 ( 한국물리학회지 )
Citation
v. 8, no. 6, 616-623
URI
http://pubs.kist.re.kr/handle/201004/11544
Appears in Collections:
KIST Publication > Article
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