Electrical property of TiO2 dielectric thin films grown on n-type InP(100) substrates by low-pressure MOCVD

Title
Electrical property of TiO2 dielectric thin films grown on n-type InP(100) substrates by low-pressure MOCVD
Authors
김은규손맹호한영기왕채현염상섭임종수민석기
Keywords
low pressure MOCVD; thin films; TiO2; InP; MOCVD
Issue Date
1995-11
Publisher
응용물리
Citation
VOL 8, NO 6, 630-634
URI
http://pubs.kist.re.kr/handle/201004/11545
ISSN
10137009
Appears in Collections:
KIST Publication > Article
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