Enhancement of side wall growth rate during MOVPE growth on patterned substrates with CCl//4.

Title
Enhancement of side wall growth rate during MOVPE growth on patterned substrates with CCl//4.
Authors
김용김무성김성일황성민강준모박양근민석기
Keywords
MOCVD
Issue Date
1995-12
Publisher
J. electron. mater. B
Citation
v. 35, 214-218
URI
http://pubs.kist.re.kr/handle/201004/11569
Appears in Collections:
KIST Publication > Article
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