Precursor gas effect on the mechanical and optical properties of ion beam deposited diamond-like carbon films.

Title
Precursor gas effect on the mechanical and optical properties of ion beam deposited diamond-like carbon films.
Authors
이광렬은광용Je Uk Oh
Keywords
DLC
Issue Date
1995-12
Publisher
Thin solid films
Citation
v. 270, 173-176
URI
http://pubs.kist.re.kr/handle/201004/11571
Appears in Collections:
KIST Publication > Article
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