Effects of sputtering condition on the internal stress of permalloy thin films.

Title
Effects of sputtering condition on the internal stress of permalloy thin films.
Authors
김희중김현태한석희강일구김상주
Keywords
internal stress
Issue Date
1995-06
Publisher
Proceedings of the 2nd Pacific RIM international conference on advanced materials and processing.
Citation
, 1369-1374
URI
http://pubs.kist.re.kr/handle/201004/11604
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE