Characteristics of Cu thin films on a glass substrate by partially ionized beam deposition at room temperature.

Title
Characteristics of Cu thin films on a glass substrate by partially ionized beam deposition at room temperature.
Authors
고석근윤영수장홍규정형진김기환
Keywords
copper
Issue Date
1996-01
Publisher
Journal of vacuum science and technology A
Citation
v. 14, no. 4, 2517-2521
URI
http://pubs.kist.re.kr/handle/201004/11685
Appears in Collections:
KIST Publication > Article
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