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dc.contributor.author고석근-
dc.contributor.author윤영수-
dc.contributor.author장홍규-
dc.contributor.author정형진-
dc.contributor.author김기환-
dc.date.accessioned2015-12-02T05:00:07Z-
dc.date.available2015-12-02T05:00:07Z-
dc.date.issued199601-
dc.identifier.citationv. 14, no. 4, 2517-2521-
dc.identifier.other5517-
dc.identifier.urihttp://pubs.kist.re.kr/handle/201004/11685-
dc.publisherJournal of vacuum science and technology A-
dc.subjectcopper-
dc.titleCharacteristics of Cu thin films on a glass substrate by partially ionized beam deposition at room temperature.-
dc.typeArticle-
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