Characterization of plasma ion implanted surfaces using time-of-flight secondary ion mass spectrometry.

Title
Characterization of plasma ion implanted surfaces using time-of-flight secondary ion mass spectrometry.
Authors
이연희한승희이정혜윤정현
Issue Date
1996-01
Publisher
Journal of Korean institute of surface engineering
Citation
v. 29, no. 6, ?-?
URI
http://pubs.kist.re.kr/handle/201004/11686
Appears in Collections:
KIST Publication > Article
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